Mass Flow Controller
Mass Flow Controllers provide precise control of gas or liquid flow rates ensuring stable, accurate performance in critical industrial and laboratory applications.
Laminar DP mass flow controllers
MC Series
High performance, versatile flow controllers
Low Pressure drop flow controllers
Whisper™ MCW Series
Ultra-low pressure drop gas flow controllers
Coriolis mass flow controllers
CODA™ KC Series
Gas-independent Coriolis flow controllers
Intrinsically safe MFCs
IS-Max™ ISMC Series
Gas flow control in explosive atmospheres
Compact Thermal MEMS MFCs
BASIS™ BC Series
Ultra compact flow controllers for OEM
applications
MFCs for sub‑atmospheric conditions
MCV/SFF sub‑atmospheric controllers
Built for vacuum coating needs: get
pneumatic shut-off or a SEMI footprint
